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发明名称
SEMICONDUCTOR SILICON SUBSTRATE
摘要
申请公布号
JPH11278991(A)
申请公布日期
1999.10.12
申请号
JP19980100257
申请日期
1998.03.27
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
SHINOMIYA MASARU
分类号
H01L21/322;C30B29/06;(IPC1-7):C30B29/06
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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