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发明名称
THIN FILM FORMING EQUIPMENT
摘要
申请公布号
JPH10163183(A)
申请公布日期
1998.06.19
申请号
JP19960320018
申请日期
1996.11.29
申请人
SONY CORP
发明人
FURUKAWA MASAKI
分类号
C23C16/44;C23C16/455;C23C16/50;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/31;H01L21/306
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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