| 摘要 |
PROBLEM TO BE SOLVED: To obtain a ceramic resistance having 10<7> -10<12> Ω.cm resistance within a wide temperature range, and further to provide an electrostatic chuck having excellent attracting characteristics within a wide temperature range regardless of having a simple structure. SOLUTION: This electrostatic chuck has an electrode layer 4 for electrostatic attraction in the interior of a ceramic substrate 2, and an electrostatic attracting face 3 of the ceramic substrate 2, comprising a ceramic consisting essentially of aluminum nitride. The ceramic contains 5-20 vol.% Ce expressed in terms of the oxide (CeO2 ), has a spacing having peaks at the positions of (a) 2.8±0.1 Åand (b) 2.7±0.1 Å by an X-ray diffraction measurement, the ratio (a)/(b) of intensities of each peak satisfying 0.05-1.2, and 10<7> -10<12> Ω.cm volume specific resistance at 50 deg.C. |
