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发明名称
摘要
申请公布号
JP2961906(B2)
申请公布日期
1999.10.12
申请号
JP19910019670
申请日期
1991.02.13
申请人
NIPPON DENKI KK
发明人
SANADA KATSU
分类号
H01L23/522;H01L21/28;H01L21/768;H01L29/43;(IPC1-7):H01L29/43
主分类号
H01L23/522
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