| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an adsorbent with high hydrophobic properties, to provide a method for obtaining such an adsorbent, an adsorption sheet using such an adsorbent, an adsorption element using such an adsorbent and an org. gas treating apparatus for using such an adsorption element. SOLUTION: A high-frequency power source 6 is started to feed a high-frequency electric current to an upper part electrode 2. Then, an alternating electric field is generated between the upper part electrode 2 and a mesh plate 10. Under this condition, carbon tetrafluoride is fed to the underside of the upper part electrode 2. As a result, the carbon tetrafluoride gas becomes a plasma condition between the upper part electrode 2 and the mesh plate 10. When this carbon tetrafluoride gas under the plasma condition is acted on a Y-type zeolite being a raw material zeolite, one fluorine of the carbon tetrafluoride is released and hydrogen atom of a hydroxyl group bound with an aluminum atom in the zeolite is substituted with carbon trifluoride.</p> |
