发明名称 |
Diaphragm structure |
摘要 |
A diaphragm structure includes a ceramic substrate having at least one window portion and a thin diaphragm laminated onto the ceramic substrate so as to cover the window portion, wherein only a part of an interface between the ceramic substrate and the thin diaphragm is joined to form a joint of the diaphragm. A diaphragm structure is free from instability caused by a breakage or deformation of a partition wall between window portions upon punching or laminating even if a diaphragm structure employs a design in which dimensions of a diaphragm portion is maintained and simultaneously a distance between diaphragm portions is made narrow to restrain a surface area excluding a diaphragm portion of a diaphragm structure or a design in which a plurality of diaphragm portion having various configurations and dimensions are disposed.
|
申请公布号 |
US5965970(A) |
申请公布日期 |
1999.10.12 |
申请号 |
US19960639609 |
申请日期 |
1996.04.29 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TAKEUCHI, YUKIHISA;MIYATA, KEIZO;OHNISHI, TAKAO;TAKAHASHI, NOBUO |
分类号 |
G01L7/08;G01L9/00;G01L9/04;H01L41/09;(IPC1-7):H01L41/08 |
主分类号 |
G01L7/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|