发明名称 Method of making non-volatile semiconductor memory arrays
摘要 A new structure of a non-volatile semiconductor memory cell array and a method of fabricating the memory arrays. The circuit layout of the memory array not only comprises of the conventional floating gates, control gates, cell sources and cell drains, but also adds the local source regions to increase the coupling ratio. Besides, the new design can reduce the number of metal contact windows, further increase the packing density of the memory array. Furthermore, an additional isolation region is formed between two bit lines so as to increase the distance between two bit lines, which can minimize the possibility of cross talk due to shirking spacing.
申请公布号 US5966601(A) 申请公布日期 1999.10.12
申请号 US19970786598 申请日期 1997.01.21
申请人 HOLTEK MICROELECTRONICS INC. 发明人 LING, CHEN;LIAO, SIU-HAN
分类号 G11C16/04;H01L21/8247;H01L27/115;(IPC1-7):H01L29/788 主分类号 G11C16/04
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