| 摘要 |
PROBLEM TO BE SOLVED: To improve characteristics and yield of a product and prevent large processing delay for product process due to failure of a processing device by storing the processing performance of the processing device group and the yield of the processed product, evaluating the stored processing performance or the product yield, and determining the processing device on the basis of the evaluation. SOLUTION: Processing performance storing means 300 registers information indicative of the performance of processing devices to a processing performance table. Yield storing means 400 registers yield information of a product processed by each processing device to a product yield table. Evaluating means 500 evaluates performance information of each processing device and yield information of each product. Next, processing device determining means 600 calculates a performance index of each device and determines the processing device to execute a process of the product depending on the magnitude of the performance index on the basis of the evaluating means 500. As mentioned above, the processing device to be processed can be determined in accordance with the processing performance and stability of the processing device and the yield and stability of the past product. |
