| 摘要 |
PROBLEM TO BE SOLVED: To ensure good film forming property and to enhance and stabilize film quality by regulating the surface temp. of a substrate immediately before coating with a chemical soln. to a temp. at least exceeding ambient temp. SOLUTION: A thin film is preferably formed in an environment at 25±15 deg.C ambient temp. and <=70% relative humidity. The temp. of the substrate at the time of coating with a chemical soln. is regulated to a temp. at least exceeding the ambient temp. The temp. differenceΔT deg.C between the temp. of the substrate at the time of coating and the ambient temp. of a coating chamber is preferably >0 to 80 deg.C. An alcoholic soln. of ter- and quarterfunctional metal alkoxides or a soln. contg. a fluoroalkyl-contg. silane compd. is used as the chemical soln. A glass, plastic, metallic or ceramic substrate is used as the substrate. The temp. regulating method is not particularly limited and heating with an electric heater or hot water may be adopted.
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