| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a catalytic electrode on a solid high-polymer electrolytic membrane which is short in deposition time, allows a low-temp. treatment, facilitate the treatment work, eliminates unnecessary waste accompanying the treatment, enables the deposition of an oxide, provides a good adhesion property and is capable of making treatment with low energy. SOLUTION: An inert gas atmosphere is established in a magnetron sputtering apparatus. An electrode of a platinum group metal is arranged as a cathode 11 and the electrode of the solid high-polymer electrolytic membrane as an anode 12. Magnetic fields are formed in parallel with the surface of the cathode 11 and a prescribed voltage is applied in the direction orthogonal with the magnetic fields, by which the particles of the platinum group metal jumping out of the cathode 11 are adhered onto the solid high-polymer electrolytic membrane which is the anode 12. |
