发明名称 Mounting platform scratch inspection device and method and bevelling inspection method and device all for transparent substrates
摘要 When mounting crystal blanks, crystal blanks can be mounted readily in a desired position on a mounting platform, and during pick-up, they can be readily detached from the mounting platform.To inspect scratches in a crystal blank 1, diffused oblique light is shined onto the crystal blank 1 from below by light-emitting diodes 6, and light reflected by scratches on the crystal blank 1 is detected by image capturing means 11 directly above the crystal blank 1. The crystal blank 1 is conveyed to the mounting platform 2 by a conveyor robot arm 15, and after inspection, it is conveyed away by same. A plurality of grooves are formed in the mounting surface 3 of the mounting platform 2. Thereby, during mounting, the crystal blank 1 does not slide over the mounting platform 2 and after mounting, it does not adhere tightly to the mounting platform 2.
申请公布号 IL125888(D0) 申请公布日期 1999.04.11
申请号 IL19980125888 申请日期 1998.08.21
申请人 NIPPON MAXIS CO., LTD. 发明人
分类号 G01N21/88;(IPC1-7):H01L 主分类号 G01N21/88
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