发明名称 Using duv curing to form a protective coating for color filters
摘要 A structure and method for producing color filters with a protective highly cross-linked and densified polymer layer is described. In one embodiment, each filter is coated with a highly cross-linked and densified polymer layer to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the highly cross-linked and densified polymer layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the highly cross-linked and densified polymer layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.
申请公布号 AU2798399(A) 申请公布日期 1999.10.11
申请号 AU19990027983 申请日期 1999.02.26
申请人 INTEL CORPORATION 发明人 NEIL WESTER
分类号 G01J3/50;G02B1/10;G02F7/00;H01L27/146 主分类号 G01J3/50
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