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发明名称
MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11274105(A)
申请公布日期
1999.10.08
申请号
JP19980075195
申请日期
1998.03.24
申请人
NEC CORP
发明人
UENO KAZUYOSHI
分类号
H01L21/31;C23C16/18;C23C16/44;C23C16/458;C23C16/50;C23C16/52;H01L21/205;H01L21/285;(IPC1-7):H01L21/285
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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