SUBSTRATE HOUSING VESSEL, SUBSTRATE HOUSING VESSEL CLEANER, SUBSTRATE HOUSING CLEANING METHOD AND SUBSTRATE TREATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable cleaning of a pod which is a closed substrate carrying jig by a convenient method. SOLUTION: A pot 10 comprises a vessel body having an opening for carrying a substrate in or out at a face, removable cap mounted on the opening, and means for tightly contacting and fixing the cap to the vessel body. The cap has an inlet 70 for introducing a gas or liq. in the vessel and outlet 80 for discharging the gas or liq. from the vessel body. After tightly contacting and fixing the cap to the vessel body, a cleaning liq. is introduced from the inlet 70 of the cap and drained from the outlet 80 to clean the interior of the vessel with the pot itself used as a cleaning tank, without a separate cleaning tank, etc.