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发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH11273603(A)
申请公布日期
1999.10.08
申请号
JP19980069882
申请日期
1998.03.19
申请人
TOSHIBA CORP
发明人
OGASAWARA MUNEHIRO
分类号
H01J37/147;G03F7/20;G21K5/04;H01L21/027;(IPC1-7):H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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