| 摘要 |
PROBLEM TO BE SOLVED: To achieve a method for measuring beams using the curve fitting processing for accurately measuring the fading of beams. SOLUTION: A control CPU 30 controls a stage drive circuit 39, moves a stage 38, and positions a detector 40 below the light axis of electron beams EB. In this state, rectangular beams are allowed to scan on a pin hole member 51 in the detector 40. The scanning is made by supplying a scanning signal from a positioning deflector control circuit 34 to a positioning deflector 29. A signal that is obtained from the detector 40 through the scanning is supplied to a waveform memory 42 through an A/D converter 28. The control CPU 30 reads waveform data from the waveform memory 42 and performs fitting processing. A beam size, a beam position, the edge sharpness of the four sides of the rectangular beams, the inclination of the four sides, and a current distribution can be obtained by the fitting processing.
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