| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the highly sensitive measurement of physical quantity, by fixing a metal film so as to cover an opening part provided at the center part of a substrate, providing an acting body and a piezoelectric film for the metal film, and directly deforming the metal film. SOLUTION: A metal film 2 is formed so as to cover an opening part 100 provided at the center part of a substrate 1, and a cylindrical acting body 6 to deform the metal film 2 in response to acceleration impressed on a piezoelectric film (piezoelectric element) 3 is provided on the lower surface of the metal film 2. As the metal film 2 is deformed by an extremely small force in response to an impressed force in this constitution, there is no need for enlarging the acting body 6. and it is possible to form a compact and highly sensitive piezoelectric detecting element. In addition, the electrode 4 of the piezoelectric element and a pad electrode 7 for connection to a control circuit provided outside the opening part 100 are connected by the air bridge wiring of wiring metal 5, and nothing except the piezoelectric film 3 is formed at the movable part of the metal film 2. Therefore, nothing prevents the deformation of the metal film 2 at the time of impression of an external force, and it is possible to detect an external force effectively and accurately.</p> |
