摘要 |
PROBLEM TO BE SOLVED: To prevent division of an amorphous semiconductor and second electrode and deterioration of the characteristics of the ohotovoltaic device. SOLUTION: A plurality of photovoltaic elements, wherein a first electrode 2, amorphous semiconductor 3, second electrode 4 are formed in this order are arrayed in series on a substrate 1, the first electrodes on the substrate 1 are etched by a laser to form specified pattern, and a laser beam 6 is emitted on the first electrodes 2, including at least both ends of the etched part, and etched part whereby the surface is bent, the amorphous semiconductor 3 is not divided, the first and second electrodes do not contact, the second electrodes 4 are not divided and the deterioration of the characteristics of the photovoltaic device is prevented to improve the yield. |