| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device by which the phase distribution of an object to be inspected can be measured in a short time at the time of measuring the phase distribution three-dimensionally. SOLUTION: In a method for measuring phase distribution in which coherent light from the same light source 1 is split into two luminous fluxes of a reference wave (a), and a wave (b) to be inspected passing through an object A to be detected and interference fringes are formed by laying the wave surfaces of the two luminous fluxes upon another, reflection mirrors 7 and/or 9 are tilted by an angleγand, at the same time, the mirrors 7 and/or 9 are fixed. In order to increase the analyzing speed of the inference fringes, the Fourier transform method is used for the analysis.
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