ELECTRODEPOSITION TREATMENT EQUIPMENT AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To suppress the generation of pits on an electrodeposited resist by dividing an electrodeposition bath in the progressing direction of a material to be electrodeposited and providing at least one electrodeposition solution communication blocking body consisting of a nonconductor having an opening part. SOLUTION: An electrodeposition bath 120 is divided into a plurality of divisions 121-123 in the progressing direction of a material 110 to be electrodeposited to almost block the communication of electrodeposition solution 140 in each division, and at least one of electrodeposition solution communication blocking bodies 161-163 is provided. In each of the divisions 121-123 divided by the electrodeposition solution communication block bodies 161-163, each electrode 130 separated by sections is provided for all or part of the sections so as to independently apply a desired electrodeposition voltage through division. Furthermore, an electrodeposition voltage can be adjusted for electrodeposition and the generation of bubbles due to electrolysis can be controlled to be less. As a result, adhesion of bubbles on the material to be electrodeposited can be reduced, and the generation of pits on an electrodeposited resist can be reduced.