| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable magnetic reluctance element which is excellent in magnetic reluctance characteristics with good yield. SOLUTION: In a manufacturing method of a magnetic reluctance element by forming a first magnetic film 12, a non-magnetic film 14 and a second magnetic film 16 on an insulation film 10 one by one, providing a shielding resist 20 forming an element main body part on the second magnetic film 16, etching a side surface of the first magnetic film 12, the non-magnetic film 14 and the second magnetic film 16 to a tilting surface on the insulation film 10 by ion milling from the side of the second magnetic film 16, applying and forming a terminal 18 from on the insulation film 10 to the tilting surface and obtaining a magnetic reluctance element by removing the resist 20, the first magnetic film 12 is left and etched on the insulation film 10 in an outside region of the tilting surface when the first magnetic film 12, the non-magnetic film 14 and the second magnetic film 16 are subjected to ion milling. |
