FRAME FOR SPREADING PELLICLE AND CARRYING DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a frame for spreading a pellicle which can be handled by a carrying arm, and to obtain a carrying device thereof. SOLUTION: An almost rectangular frame for spreading a pellicle 16 is fitted on a mask and formed so that a pellicle protecting the surface of the mask is spread. Then, the outside wall surfaces of the frame positioned between a surface where the pellicle is spread and a surface fitted to the mask and set mutually in parallel are respectively provided with recessed parts 16b engaged with a means for holding the frame.