DRY MANUFACTURE OF LIQUID CRYSTAL DISPLAY USING PARTICLE BEAM ALIGNMENT

摘要

PROBLEM TO BE SOLVED: To obtain a low-cost, reliable light crystal display which is manufactured in a small number of steps by depositing an amorphous alignment layer on a transparent substrate by using a dry machining method. SOLUTION: The amorphous alignment layer is deposited on the transparent substrate by using the dry machining method such as plasma-reinforced chemical vapor-phase deposition. Then the atomic structure of the dry-machined alignment layer is aligned to at least one desired direction by using a particle beam device 48. A plasma generation unit 52 operates to generate ions and a group of three electrodes 54, 56, and 58 takes ions out to irradiate the substrate 20. The substrate 20 is fixed to a plate fixation platform 62 so that an angleθas an angle of incidence of accelerated particles to a line perpendicular to the substrate 20 is maintained. The angleθis preferably in a range of about 20 to 80 deg.. The alignment layer may be formed by a nonaqueous gas environmental deposition method such as vapor deposition, sputter deposition, and ion beam deposition.