| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor element of high sensor sensitivity and its simple manufacture. SOLUTION: This acceleration sensor element comprises a weight 30, a support stage 31, and a flexible plate 32 having piezoelectric elements 34a, 34b each holding a piezoelectric body 33 between a pair of electrodes 57a, 57b and 58. The sensor element detects in three dimensions a direction and a size of an acceleration acting from outside from electric charges generated by the piezoelectric bodies 33 in accordance with a bend of the flexible plate 32 corresponding to the acceleration. The piezoelectric elements 34 are arranged to be continuously loaded on a flexible part 32a of the flexible plate 32 from above the weight 30 and/or the support stage 31 at a projection face seen from above the flexible plate 32. Green sheets of a tomographic shape of the weight 30, support stage 31 and flexible plate 32 are layered and pressured thereby obtaining a layer body. The layer body is integrally baked to obtain a baked body. The piezoelectric elements 34a, 34b are formed to the baked body by a thick film method, and baked. |
