| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable effectively performing a plurality of kinds of inspections to an object, by using the position information of inspection results of the object between a plurality of inspecting apparatus by using the coordinate system proper to the object to be inspected. SOLUTION: A conversion formula between specimen table coordinate systems,α,γand a substrate coordinate systemβproper to a semiconductor substrate 2 is determined in inspecting apparatus A, B. Specimen tables 1, 10 are moved with specimen table controlling parts 7, 14, the whole surface of the semiconductor substrate 2 is relatively scanned by laser beams 3a, 11a, and existence of a foreign matter 200 is judged with a judging circuit 6. When the foreign matter 200 is detected, coordinates of the specimen tables 1, 10 are recorded in coordinate converting parts 8, 15. After the inspection is finished, the coordinate of a sticking position of the foreign matter 200 is converted to a coordinate concerning the semiconductor coordinate systemβand recorded in a transportable storage medium M. Since delivery of inspection results is performed between a plurality of the inspecting apparatus by using the common substrate coordinate systemβas parameter, useless retrieving operation can be omitted.</p> |
