| 摘要 |
PROBLEM TO BE SOLVED: To provide a charge particle beam transfer apparatus which can improve the frequency response of a deflector, etc., and to which a structural strength can be given. SOLUTION: A charged particle beam transfer apparatus transfers a pattern on a mask onto a sensitive substrate 21. The transfer device is provided with a projection optical system which forms the image of the pattern on the substrate 21, by projecting a patterned charged particle beam upon the substrate 21 through the mask. The optical system has a vacuum wall 3 which evacuates the passage of the charged particle beam to a vacuum, and a part of it has a thin portion 13 having a thickness of 100-500μm. A bobbin wound with a deflecting coil 11 is stuck to the outside of the thin portion 13, and the wall 3 is made of titanium or a titanium alloy. Therefore, the frequency response of a deflector, etc., can be, improved and at the same time, the structural strength can be given to the transfer device.
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