| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treating device that can unload a substrate, from a cassette and carry the substrate to a substrate treatment part without raising and lowering the cassette. SOLUTION: A device has a substrate 11 that allows a cassette C to stand still for placing. An indexer carrier unit 30 that can move along the substrate 11 is raised and lowered for unloading a substrate W from the cassette C. The substrate W is transported to a substrate delivery position P while being placed on the support pin of the unit 30. A substrate-aligning mechanism being mounted to the unit 30 aligns the substrate, the support pin is raised, and the substrate W is raised up to the height where it can be delivered to a process carrier unit 21. The process carrier unit 21 receives the substrate W on the support pin for carrying to treatment units 231 , 232 , 241 -243 . When the substrate W is unloaded and is carried, the cassette C is not raised and lowered, thus preventing generation of dusts caused by vibration of the cassette C. |
