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发明名称
METHOD FOR COOLING SUBSTRATE IN VACUUM FILM FORMING DEVICE
摘要
申请公布号
JPH11269635(A)
申请公布日期
1999.10.05
申请号
JP19980074090
申请日期
1998.03.23
申请人
SUMITOMO HEAVY IND LTD
发明人
TANAKA MASARU
分类号
C23C14/32;C23C14/24;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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