| 摘要 |
A surface inspecting apparatus includes linear light sources 11, 13 for emitting illumination light toward a surface of a body panel 10 to be inspected, CCD cameras 12, 14 for imaging the surface and forming its illuminated images on the basis of reflection light from the surface, and an inspecting unit for detecting a defect existing on the surface on a basis of the illuminated image and outputting detected information about the defect. In the arrangement, the sources 11, 13 are arranged so as to obliquely emit the illumination light toward the surface at incident angles alpha from 80 to 90 degrees. While, the cameras 12, 14 are arranged so as to receive diffused reflection light of the illumination light reflected by the surface at reflection angles beta each smaller than the incident angle alpha .
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