W HYPERFINE PARTICLE AND PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain W hyperfine particles capable of various operations and controls as particle simple substances, fused bodies or the like with high producibility. SOLUTION: W oxide particles 2 such as WO3 particles are arranged on an amorphous carbon supporting film 1, and this W oxide particles 2 are irradiated with electron beams 3 with intensity in the range of 10<23> to 10<24> e/cm<2> .sec in a high vacuum atmosphere. By the irradiation of the electron beams 3 having such intensity, W hyperfine particles 4, e.g. having the particle size of <=10 nm diameter are formed. The W hyperfine particles 4 are composed of W removed from the W oxide particles 2.