发明名称 CONSTANT TEMPERATURE/HUMIDITY AIR FEEDER
摘要 PROBLEM TO BE SOLVED: To stably maintain the temperature and humidity of fed air without consuming useless dehumidification energy. SOLUTION: This air feeder has such an arrangement that air is consecutively passed through a dehumidifier 10, a heater 20 and a humidifier 30 so as to adjust the temperature and humidity of the air at preset values. This device comprises a judging means for judging an excess and deficiency in the amount of dehumidification by the dehumidifier 10 based on the manipulated variable of a control system 60 for controlling the humidifier 30, and a dehumidification amount control means 41, 40 for changing the amount of dehumidification to the side of increase when the dehumidification amount is judged as being deficient, and for changing the amount of dehumidification to the side of decrease when the dehumidification amount is judged as being in excess.
申请公布号 JPH11270891(A) 申请公布日期 1999.10.05
申请号 JP19980074252 申请日期 1998.03.23
申请人 KOMATSU ELECTRONICS KK;TOKYO ELECTRON LTD 发明人 ITO KATSUMI;FUKAWA HIROYUKI;KANEDA MASATOSHI
分类号 H01L21/027;F24F11/02;(IPC1-7):F24F11/02 主分类号 H01L21/027
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