发明名称 SEMICONDUCTOR LASER DEVICE
摘要 A method for fabricating a semiconductor laser diode and the laser diode constructed therewith. A laser diode according to the present invention is constructed by depositing a buffer layer (9) on a substrate (8). A crystalline layer (10-13) is then deposited on the buffer layer (9). The crystalline layer (10-13) includes the waveguide for the laser. A portion (110) of the buffer layer (9) is etched from under the crystalline layer (10-13) leaving a portion (110) of the crystalline layer (10-13) cantilevered over the substrate (8). The crystalline layer (10-13) is then cleaved in the cantilevered portion (110) to generate a reflecting surface (15) for reflecting light generated in the waveguide. This method is well suited for GaN based laser diodes that are to be constructed on sapphire substrates.
申请公布号 EP0956623(A1) 申请公布日期 1999.11.17
申请号 EP19980903741 申请日期 1998.01.27
申请人 HEWLETT-PACKARD COMPANY 发明人 KANEKO, YAWARA
分类号 H01L33/32;H01S5/00;H01S5/02;H01S5/323 主分类号 H01L33/32
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