发明名称 Manufacturing method of a semiconductor apparatus having an electron donative surface in a side wall portion
摘要 An insulating film is formed on the surface of the base of a semiconductor, and a portion of the insulating film is removed to cause the surface to appear outside. The exposed surface is terminated with hydrogen, and then energy beams are applied to selectively remove the terminating hydrogen. Metal is selectively deposited on the portion terminated with left hydrogen atoms.
申请公布号 US5963812(A) 申请公布日期 1999.10.05
申请号 US19970814016 申请日期 1997.03.10
申请人 CANON KABUSHIKI KAISHA 发明人 KATAOKA, YUZO;ASABA, TETSUO;MAKINO, KENJI;YUZURIHARA, HIROSHI;FUJITA, KEI;KAMEI, SEIJI;AKINO, YUTAKA;YUGE, YUTAKA;SHIMOTSUSA, MINEO;KUWABARA, HIDESHI
分类号 H01L21/02;H01L21/285;H01L21/8246;H01L27/112;(IPC1-7):H01L21/336 主分类号 H01L21/02
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