| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous nitrided glass membrane by which the essential gas species such as N2 and CO2 having different molecular sizes are separated, high in N2 permeability and excellent in N2 permseletivity and its production method. SOLUTION: This porous glass membrane of SiO2 -B2 O3 -Rx O (R is at least one kind element among groups 1A, 2A and 3A in a periodic table) is formed on the surface of a porous ceramic substrate and contains 0.0001-20 mol.% nitrogen atom based on the SiO2 component. The deposited layer of the glass powder is formed on the substrate, heated and melted in gaseous nitrogen or ammonia at 10-9.3×10<5> PA and quenched to room temp. to form a glass membrane, and the glass membrane is leached with an acid soln. to produce the porous nitride glass membrane.
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