Probe station having environment control chambers with orthogonally flexible lateral wall assembly

摘要

A probe station for probing a test device has a chuck assembly substantially enclosed by an environment control enclosure and laterally movable relative to such enclosure. The environment control enclosure includes a flexible wall assembly interconnected with the chuck assembly to enable such lateral movement thereof along mutually perpendicular directions while maintaining the integrity of the enclosure. The flexible wall assembly has flexible pleats formed therein extending along respective different lateral directions to enable such lateral movement.