| 发明名称 |
Synthesis of phosphorus-doped diamond |
| 摘要 |
A synthesis of phosphorus-doped diamond by a microwave plasma method using a volatile hydrocarbon and hydrogen mixed therewith, as a reaction gas, wherein phosphorus is used as a dopant, and hydrogen bonded to the phosphorus is dissociated so that the phosphorus is introduced into diamond as an impurity without being bonded to hydrogen.
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| 申请公布号 |
US5961717(A) |
申请公布日期 |
1999.10.05 |
| 申请号 |
US19970791614 |
申请日期 |
1997.01.31 |
| 申请人 |
NATIONAL INSTITUTE FOR RESEARCH IN INORGANIC MATERIALS |
发明人 |
KAMO, MUTSUKAZU;KOIZUMI, SATOSHI;OZAKI, HIROYUKI |
| 分类号 |
C30B29/04;C01B31/06;C30B25/10;(IPC1-7):C30B25/16 |
主分类号 |
C30B29/04 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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