HIGHLY PURIFIED ALKOXYSILANE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To obtain a highly purified alkoxysilane extremely low in halogen content, and to provide its efficient producing method capable of dispensing with any complicated process for refinement and corroding no manufacturing apparatus. SOLUTION: This alkoxysilane produced from a metal silicon and an alcohol in the presence of a copper catalyst and containing an extremely small amount of halogen is obtained by using a copper compound having a melting point of <=300 deg.C as the copper catalyst and heat-treating a mixture of the metal silicon and the copper compound for activation.