发明名称 |
RETAINER OF OZONE ASHER |
摘要 |
PURPOSE: A retainer of an ozone ashier is provided to prevent the pollution due to elements like Al, O, and Si in an asking process by using a new retainer of an ozone ashier. CONSTITUTION: A retainer of an ozone ashier comprises a hole(70) and a round(74). The holeis shorter than a conventional hole. The round has a center point in an inner portion of the retainer(60). An asking process is performed under the stable state since whirlpool is not generated in the hole entrance. Since the length of the hole is shorter than the length of hole of the conventional retainer and the surfaces of the hole and the round are grinded, particles are not adhered to an inner wall of the hole. The corrosion of the surface is prevented by performing an electric polishing process for the surface.
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申请公布号 |
KR20000024751(A) |
申请公布日期 |
2000.05.06 |
申请号 |
KR19980041427 |
申请日期 |
1998.10.01 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, JUNG JU;KIM, JIN SUNG;SHIN, EUN HEE;CHOE, BAEK SUN |
分类号 |
H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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