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发明名称
摘要
申请公布号
JP2955305(B2)
申请公布日期
1999.10.04
申请号
JP19890273695
申请日期
1989.10.23
申请人
TOSHIBA KK
发明人
WADA TETSUNORI
分类号
H01L21/66;H01L29/00;(IPC1-7):H01L29/00
主分类号
H01L21/66
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