POWER LOSS RECOVERY FOR WAFER HEATER

摘要

Apparatus comprises a power loss recovery mechanism for use with a semiconductor wafer heater assembly and has a) a pneumatic air cylinder and compressed air supply, the cylinder mechanically linked to the wafer drive assembly for moving the wafer heater assembly between an operating and non-operating process position; b) control valve normally closed during heater operation, and open during interruption to the electrical supply in order to move the heater assembly to a non-operative position. Also claimed is a process for recovery of power loss in a semiconductor wafer heater assembly to prevent damage to wafers under process during an electrical power failure, using a pneumatic actuator assembly claimed above. A mechanical assembly for power loss recovery similar to that claimed above, but utilising pneumatic motor to move the heater assembly instead of a pneumatic cylinder assembly is also claimed, together with a process using the equipment.