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发明名称
Mikrosystem mit integrierter Schaltung und mikromechanischem Bauteil und Herstellverfahren
摘要
申请公布号
DE59506659(D1)
申请公布日期
1999.09.30
申请号
DE19955006659
申请日期
1995.04.24
申请人
SIEMENS AG
发明人
ZETTLER, THOMAS
分类号
G01L1/14;G01P15/125;H01H1/00;H02N1/00;(IPC1-7):G01L1/14
主分类号
G01L1/14
代理机构
代理人
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地址
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