Verfahren zum Herstellen einer elektrostatischer Spannvorrichtung mit Oxyd-Isolator

摘要

An electrostatic chuck and method of manufacture of the chuck in which the component parts are machined, then partially anodized to provide a hard insulating surface on surfaces that are not in contact with the wafer, and then assembled, after which the top surface abutting the workpiece is machined and a correction radius is cut to suppress discharges between the electrodes (100,200).