| 摘要 |
A substrate processing system includes a primary processing assembly (500) and secondary processing assembly (510). The secondary processing assembly (510) has one or more interconnected modules (514, 516, 322, 502, 504, 524, 526, 540, 542) and includes one or more process stations (520, 530). The primary and secondary processing assemblies (500, 510) are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly (510) may include one or more modules (514, 516, 322, 502, 504, 524, 526, 540, 542) which are interconnected to provide a desired system configuration. A dual processing module (520), including first and second process stations, is selectably operable in a serial mode or a parallel mode.
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