| 摘要 |
The translucid film is coated with an anti-reflective layer, this prevents inspection light from penetrating the film, and reduces refraction of the light which may reduce the accuracy of inspection results. A method of inspecting for defects in translucid films comprises: (a) forming a translucid film (21a,b) on a semiconductor substrate (20); (b) forming a buffer layer (23a,b) of antireflective coating on the film and defects (22) for preventing inspecting light from penetrating it; (c) collecting and calculating the reflecting light message from the buffer layer to calculate inspection results.
|
