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发明名称
SURFACE TREATMENT FOR MICROMACHINING
摘要
申请公布号
EP0860867(A4)
申请公布日期
1999.09.29
申请号
EP19970937804
申请日期
1997.08.27
申请人
STELLA CHEMIFA KABUSHIKI KAISHA
发明人
KIKUYAMA, HIROHISA;MIYASHITA, MASAYUKI;YABUNE, TATSUHIRO;OHMI, TADAHIRO
分类号
C23F1/24;H01L21/308;H01L21/311;H01L21/3213;(IPC1-7):H01L21/308
主分类号
C23F1/24
代理机构
代理人
主权项
地址
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