| 摘要 |
<p>A fabrication apparatus including an emergency stop circuit which is an emergency stop switch has a first electromagnetic switch for supplying and shutting off power to the apparatus and a second electromagnetic switch for controlling power supply to an electromagnetic coil of the first electromagnetic switch. Power is supplied to the electromagnetic coil of the first electromagnetic switch from the primary side of the first electromagnetic switch via a contact of the second electromagnetic switch. An uninterruptible power source supplies power to an electromagnetic coil of the second electromagnetic switch via the emergency stop circuit. This emergency stop switch is inserted midway along a power line to the electromagnetic coil of the second electromagnetic switch. This allows safe emergency stop of the fabrication apparatus for semiconductors and the like. When the operation of the fabrication apparatus stops due to stoppage of power, the apparatus is automatically reactivated after the power is recovered. This increases the productivity. <IMAGE></p> |
