| 发明名称 |
Crystal pulling apparatus |
| 摘要 |
Between its inner and outer walls (18, 19), the pipe (7) serving for replenishment of the crystal material in granular form has an annular space (20) which is open at the bottom end, and is connected to a protective gas supply source (13). |
| 申请公布号 |
EP0945528(A1) |
申请公布日期 |
1999.09.29 |
| 申请号 |
EP19980120269 |
申请日期 |
1998.10.27 |
| 申请人 |
LEYBOLD SYSTEMS GMBH |
发明人 |
ALTEKRUEGER, BURKHARD, DR.;AUFREITER, JOACHIM |
| 分类号 |
C30B15/02;C30B29/06 |
主分类号 |
C30B15/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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