| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing system executing highly accurate high efficiency processing while simplifying the processing work and shortening the period thereof. SOLUTION: When a cooling plate 13A moves from a first position T1 to a second position T2, a work W1 held by a work holder 9 is introduced into an ion source 2A. In the deposition, three actions of rotation, application of a bias voltage and cooling are transmitted simultaneously to the work W1 through a cooling pipe 12A and the cooling plate 13A. Furthermore, the work W1 is isolated electrically from a carrier 6 or a vacuum chamber 1 through a shaft 21 made of an insulating material.
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