| 摘要 |
PROBLEM TO BE SOLVED: To stably drive an ink jet head utilizing an electrostatic force and to accurately execute the positioning in the manufacturing process therefor. SOLUTION: This ink jet head consists of a lower electrode substrate, an intermediate liquid chamber substrate and an upper nozzle chamber. A ejection chamber 23 (liquid chamber) is formed on the intermediate substrate and a diaphragm 22 is formed on the bottom section thereof. An electrode 13 is formed on the lower substrate. The substrate to be the diaphragm 22 is made of a semiconductor material and has a first conductive mould, the electrode is made of a semiconductor material and has second conductive mould and the substrate on which the electrode is formed is made of a semiconductor material and has a first conductive mould.
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