| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film manufacturing device which is constituted to carry out a susceptor from a reaction chamber, without exposing the inside of the reaction chamber to the outside air. SOLUTION: A thin-film manufacturing device 10 is constituted to form a thin film on the surface of a substrate 1, placed on a susceptor 12 set up in a reaction chamber 11 by introducing a source gas to the surface. After the thin film has been formed, the susceptor 12 is carried to a carrying-out chamber 19 adjacent to the reaction chamber 11 by means of a carrier 17. The substrate 1 and susceptor 12 can be preferably carried by means of the same carrier 17, while the substrate 1 is placed on the susceptor. |
